Method and apparatus for determining the robustness of memory cells to alpha-particle/cosmic ray induced soft errors

ABSTRACT

Apparatus and methods for determining the robustness of a device to soft errors generated by alpha-particle and/or cosmic ray strikes. In one embodiment, the method includes the steps of estimating energies of the alpha-particle and/or cosmic ray strikes; computing a number of electron-hole pairs generated for a predetermined distance of travel by the alpha-particle and/or cosmic ray into the device based on the estimated energies; computing the absorption coefficient in silicon for a light pulse with a predetermined wavelength; computing a first pulse width/intensity for the light pulse to generate the number of electron-hole pairs for the predetermined distance of travel by the light pulse into the device; producing the light pulse, the light pulse having a light pulse energy which is controlled by a pulse width and an intensity, wherein the pulse width/intensity is at a second pulse width/intensity which is less than the first pulse width/intensity and the light pulse energy is at a first light pulse energy which is low enough to avoid generating soft errors in the device; applying the light pulse to the device at a predetermined location; varying the light pulse energy to a second light pulse energy to generate a soft error; and detecting soft errors in the device. The present invention additionally provides inexpensive methods and apparatus that would accurately simulate an alpha-particle and/or cosmic ray strike in predetermined areas of a memory cell.

TECHNICAL FIELD

The present invention relates generally to semiconductors and morespecifically to soft errors induced by alpha-particles/cosmic ray inmemory cells.

BACKGROUND ART

Storage of data and instructions in a memory structure is necessary tovirtually any data processor application. For this reason, among others,the development of high-performance memory structures has accompaniedthe development of data processing circuits and integratedmicroprocessors in particular. Thus, as integration density andprocessing power of microprocessors has increased, the same attributeshave been sought in storage per chip as well as to increase speed of thememory structure.

Memory structures are often considered to fall into one of two groups:static memories and dynamic memories.

Highest memory read access speed is achieved by static random accessmemories (SRAMs). In such static memories, the data are stored in abistable latch (or flip flop) comprised of active circuits. Therefore,no time is required for either refresh or other operations to restorecharge after reading.

While bipolar, n-channel, or p-channel SRAMs are not generally regardedas relying on stored charge (since, in normal operations, any chargelost through reading or leakage is continually replaced by operation ofthe active bistable circuit there), when implemented with complementaryfield effect transistors, voltages present on various nodes, such as thedrain nodes, may cause storage of charge in a depletion region within oraround a portion of the field effect transistors.

If an energetic particle from the environment, such as analpha-particle, strikes a junction, such as the drain junction,surrounded by such a depletion region, electrons and holes will begenerated within the underlying body of semiconductor material and willcollect along the boundary of the depletion region. If the energeticparticle strikes a junction (e.g. the drain junction of an N-typetransistor) holding a charge in a depletion region, the size of thedepletion region, the stored charge, and the voltage across the junctionwill be reduced by the charge perturbation. Similarly, if an energeticparticle strikes a junction of a P-type transistor at low voltage, thecharge perturbation will cause the stored charge and the voltage to beincreased. Thus, if the charge perturbation is sufficiently large, thestored logic state may be reversed. This is commonly referred to as a“soft error” since the error is not due to a hardware defect and thecell will operate normally thereafter (although it may contain erroneousdata until rewritten). Soft errors are increased by stand-by operationat reduced voltage.

Dynamic random access memories (DRAMs) offer the greatest potential forreduction of cell size since a DRAM cell typically includes only onetransistor and a smaller storage capacitance. Therefore, DRAMs have thepotential for the greatest amount of storage per chip. Power consumptionis also relatively low. On the other hand, a storage capacitor is usedas the storage mechanism and since some degree of leakage is unavoidablein any storage structure, the stored charge representing the stored datamust be refreshed periodically. This requirement for periodic refreshingof stored data causes some periods during which the DRAM cell is notavailable to be read and thus increases the average cycle time andeffectively reduces the speed of the response of the memory.

If an energetic particle from the environment, such as analpha-particle, strikes a junction, such as the drain junction of a DRAMcell, electrons and holes will be generated near the drain regioncausing leakage current to flow to the ground. The leakage current willdischarge the storage capacitor. Generally, when the storage capacitoris charged, the DRAM cell is at a high logic level and when the storagecapacitor is discharged, the DRAM is at a low logic level. Accordingly,an alpha-particle strike can cause the logic level of the DRAM cell tochange from a high logic level to a low logic level. Therefore, therewill be a loss of data stored, an error, in the DRAM cell betweenrefreshed cycles.

Alpha-particles can induce similar soft error problems in semiconductormemory cells that are embedded in microprocessor or other logiccircuits.

A performance parameter of an SRAM cell is the critical charge, Q_(c)which is the amount of charge that will cause a logic state reversal ofthe latch by causing a sufficiently large voltage disturbance. In thecase of a DRAM cell, Q_(c) is the amount of charge which will cause alogic state reversal by causing a sufficiently large leakage current toflow that will discharge the storage capacitor. Unfortunately, bothminiaturization and lowered operating voltage (for example, themigration to 3.3 volt and beyond devices) of SRAM and DRAM cells withhigher integration densities and/or lowered operating voltages alsoreduce the value of Q_(c) for stable operation of the memory cells.Accordingly, SRAMs and DRAMs have become increasingly vulnerable to softerrors. Many attempts have been made to simulate the alpha-particlestrikes in memory cells in efforts to determine their robustness toalpha-particle induced soft errors.

However, many of these attempts to determine the robustness of a deviceto alpha-aparticle induced soft errors involve tedious and burdensomemethods to generate alpha-particles. Focused alpha-particle sources,such as a lead-encased source, are very expensive, huge in size, andconsidered hazardous due to radioactivity. A focused alpha-particle beamrequires a room-sized accelerator and comprehensive shielding.Therefore, such alpha-particle sources are not allowed, nor are they ofa size that can be accommodated, in a typical semiconductormanufacturing facility or laboratory where the determination of devicerobustness to alpha-particles would normally be done. Where is smalleralpha-particle sources are available, they are subject to OSHA(Occupational Safety and Health Agency) licensing. In both cases, thesources provide radiation hazard risk.

Another drawback of using a conventional alpha-particle source is theinability to control the direction of strike of the alpha-particles. Thealpha-particles travel in random directions and are not be controllableso that they cannot be directed to strike predetermined locations, suchas the drain junctions of a transistors in a memory cell. Absent suchdirectional control, the resulting alpha-particle induced soft errorscan not be reproduced. This makes duplication of alpha-particle effectsunrepeatable.

An inexpensive method and apparatus having a smaller size that wouldsimulate an alpha-particle strike in predetermined areas of a memorycell with directional control and repeatable results, has long beensought, but has eluded those skilled in the art.

DISCLOSURE OF THE INVENTION

The present invention provides a method and apparatus for determiningthe robustness of a device to soft errors generated by alpha-particleand/or cosmic ray strikes.

The present invention further provides a method for determining therobustness of a device to soft errors generated by alpha-particle and/orcosmic ray strikes by estimating energies of the alpha-particle and/orcosmic ray strikes; computing a number of electron-Docket hole pairsgenerated for a predetermined distance of travel by the alpha-particleand/or cosmic ray into the device based on said estimated energies;computing the absorption coefficient in silicon for a light pulse with apredetermined wavelength; computing a first pulse width for said lightpulse to generate said number of electron-hole pairs for saidpredetermined distance of travel by said light pulse into the device;producing said light pulse, said light pulse having a light pulse energywhich is controlled by a pulse width and an intensity, wherein saidpulse width/intensity is at a second pulse width/intensity which is lessthan said first pulse width/intensity and said light pulse energy is ata first light pulse energy which is low enough to avoid generating softerrors in the device; applying said light pulse to the device at apredetermined location; varying said light pulse energy to a secondlight pulse energy to generate a soft error; and detecting soft errorsin the device.

The present invention provides an apparatus for determining therobustness of a device to soft errors generated by alpha-particle and/orcosmic ray strikes which includes a light source for producing a lightpulse which is applied to the device at a predetermined location, saidlight pulse having a light pulse energy; a light pulse energy varyingcircuit coupled to said light source and configured to vary said lightpulse energy; a processor coupled to said light source and said lightpulse energy varying circuit for controlling said light source and saidlight pulse energy varying circuit and configured to determine number ofelectron-hole pairs generated for a predetermined distance of travel bythe alpha-particle and/or cosmic ray into the device based on anestimated energies of the alpha-particle and/or cosmic ray strikes, theabsorption coefficient in silicon for a light pulse with a predeterminedwavelength, and first pulse width for said light pulse to generate saidnumber of electron-hole pairs for said predetermined distance of travelby said light pulse into the semiconductor device; and a detectingcircuit coupled to the device and configured to detecting soft errors inthe device.

The present invention additionally provides inexpensive methods andapparatus that would accurately simulate an alpha-particle and/or cosmicray strike in predetermined areas of a memory cell.

The above and additional advantages of the present invention will becomeapparent to those skilled in the art from a reading of the followingdetailed description when taken in conjunction with the accompanyingdrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram of a SRAM cell;

FIG. 2 is a schematic diagram of a DRAM cell;

FIG. 3 is a simplified illustration of one embodiment of an apparatusfor determining the robustness of a device to alpha-particle/cosmic rayinduced soft errors in accordance with the present invention;

FIG. 4 is a block diagram of a method for determining the robustness ofa device to alpha-particle/cosmic ray induced soft errors in accordancewith the present invention;

FIG. 5 is a graph showing the value of the absorption coefficient β of alight pulse as a function of its wavelength λ;

FIG. 6 is simplified illustration of a method for focusing a light pulseon to a predetermined location in a transistor in accordance with thepresent invention;

FIG. 7 is a simplified illustration of a method for determining Q_(c),and for focusing a light pulse on to a predetermined location in atransistor in accordance with the present invention; and

FIG. 8 is a simplified illustration of a method for determining theangle sensitive of a transistor to a light pulse (or alpha-particle withequivalent energy) in a transistor in accordance with the presentinvention.

BEST MODES FOR CARRYING OUT THE INVENTION

Referring now to FIG. 1, therein is shown a schematic diagram of a SRAMcell 100. SRAM 100 includes P-channel transistors 102 and 104, andN-channel transistors 106 and 108. The sources of the P-channeltransistors 102 and 104 are coupled to V_(CC). The sources of theN-channel transistors 106 and 108 are coupled to ground. The drains ofthe P-channel transistor 102 and the N-channel transistor 106 arecoupled to node 110. Similarly the drains of the P-channel transistor104 and the N-channel transistor 108 are coupled to node 112. The gatesof the P-channel transistor 102 and the N-channel transistor 106 arecoupled to node 114, which is coupled to node 112. The gates of theP-channel transistor 104 and the N-channel transistor 108 are coupled tonode 116, which is coupled to node 110.

For the purposes of discussion, it will be assumed that node 112 is at ahigh logic level, which means that the P-channel transistor 104 is offand the N-channel transistor 108 is on. Furthermore, the P-channeltransistor 102 is on and the N-channel transistor 106 is off.

When an alpha-particle with sufficient energy strikes node 110, thecharges held at that node due to the gate capacitor of the N-channeltransistor 108 will be discharged. This will cause the N-channeltransistor 108 to be turned off, thereby changing the logic state atnode 112 from a high logic level to a low logic level. This will cause atemporary data loss although there is no destruction to the memory cellitself.

Referring now to FIG. 2, therein is shown a schematic diagram of a DRAMcell 200. DRAM 200 includes a transistor 202 and a capacitor 204 forstoring charges. The gate of the N-channel transistor 202 is coupled toa word line 206. The source of the N-channel transistor 202 is coupledto a bit line 208. The drain of the N-channel transistor 202 is coupledto one of the two electrodes of capacitor 204. The other electrode ofcapacitor 204 is coupled to ground. When capacitor 204 is charged, itrepresents a high logic level. On the other hand, when capacitor 204 isdischarged, it represents a low logic level. For the purposes ofdiscussion, it will be assumed that capacitor 204 is charged, i.e., itis at a high logic level. When an alpha-particle with sufficient energystrikes the drain side of the N-channel transistor 202, it will causecapacitor 204 to discharge, thereby changing its logic state from a highlogic level to a low logic level. If that occurs, there will be atemporary loss of the bit of data stored in DRAM 200. This will cause aproblem if there is a read before the lost data is restored during thenext refresh cycle.

To simulate and determine the robustness of memory cells such as SRAM100 or DRAM 200 to alpha-particle induced soft errors, it would bedesirable to provide inexpensive and safe methods and apparatus having asmaller size that could be accommodated in a typical semiconductormanufacturing facility or laboratory. In addition, the simulatedalpha-particle must be controllable to strike predetermined locations inthe memory cells, such as the drain junction of the N-channel transistor106 in SRAM 100 or the drain junction of the N-channel transistor 202 inDRAM 200. The present invention provides such methods and apparatus.

Preferred embodiments of the present invention will now be describedwith reference to the drawings.

Referring now to FIG. 3, therein is shown an apparatus 300 constructedin accordance with the present invention which uses light pulses tostrike at a predetermined location on the surface of a semiconductordevice to simulate soft errors generated by alpha-particles and/orcosmic rays. The apparatus 300 includes a light source 302, a firstfixture 304, a second fixture 306, a power supply 308, a detectingcircuit 310, a light pulse energy varying circuit 312, and a processor314. The light source 302 provides a light pulse 316 with apredetermined light pulse energy.

A semiconductor integrated circuit 318 is disposed on the second fixture306. The first fixture 304 and the second fixture 306 can be movablerelative to each other in the X, Y, Z, and θ position. The relativemovement can be accomplished using conventional X-Y-Z-θ tabletechnology. The power supply 308 is coupled to the integrated circuit318 to provide power to the integrated circuit 318. The detectingcircuit 310 is coupled to the integrated circuit 318 to detect the logicstate of a memory device (not shown) within the integrated circuit 318.The light pulse energy varying circuit 312 is coupled to the lightsource 302 to vary the light pulse energy of light pulse 316 by changingthe intensity and the pulse width of the light pulse 316. The processor314 is coupled to the light pulse energy varying circuit 312 forcontrolling the light pulse energy varying circuit 312. The processor314 is also coupled to receive the output of the detecting circuit 310.When the output of the detecting circuit 310 indicates a change in thelogic state of the memory device, the processor 314 will record thecorresponding intensity and pulse width of the light pulse 316 asprovided by the light pulse energy varying circuit 312.

A preferred method for operating the apparatus 300 in FIG. 3 will bediscussed with reference to FIGS. 3-5. Referring now to FIG. 4, thereinis shown a flowchart for determining the robustness of a memory device(not shown) in the semiconductor integrated circuit 318 (as shown inFIG. 3) to soft errors induced by alpha-particle and/or cosmic raystrike using the apparatus 300 in accordance with the present invention.For the purposes of discussion, it will be assumed that light source 302is a laser source and light pulse 316 is a laser pulse.

The first step 402 of the present process entails estimating theenergies of alpha-aparticles that may strike the memory cell.

In a second step 404, the processor 314 (as shown in FIG. 3) compares anumber of electron-hole pairs generated for a predetermined distance oftravel in the memory device by the alpha-particle. For example, a 1 MeValpha-particle has energy equivalent to 8×10⁵ light pulses which cangenerate 8×10⁵ electron-hole pairs when it strikes a silicon junctionsuch as the drain junction of the memory device. Similarly, a 5 MeValpha-particle has energy equivalent to 4×10⁶ light pulses. Since therange of alpha-particle penetration is approximately 20 μm in silicon,for a 2 μm travel (the depth of the depletion region at the drainjunction of the memory device), the number of electron-hole pairsgenerated would be equal to 4×10⁵.

In the next step 406, the processor 314 will compute the absorptioncoefficient (β) for the light pulse 316 (as shown in FIG. 3) with apredetermined wavelength. With reference to FIG. 4, therein is shown agraph illustrating the value of β in silicon for a light pulse withrespect to its wavelength λ. This graph is commonly known in the art andis available, for example, in a semiconductor databook entitled “SiliconSemiconductor Data” authored by Helmut F. Wolf of Signetics Corporation(Pergamon Press). The processor 314 can store this β versus λrelationship in a look-up table within the memories of the processor. Inoperation, the processor 314 can determine the value of β for any givenvalue of λ by checking the look-up table. For example, in the case of alight pulse with a wavelength of approximately 0.9 μm, the graph in FIG.5 shows a β value of approximately 200 cm⁻¹.

When a light pulse travels for a small distance in silicon, such as thedepth of the depletion region around the drain junction (i.e., around 2μm), the proportion of energy absorbed by the silicon is approximatelyequal to β*t, where t is the distance traveled (the light energyabsorbed varies as 1-exp(−βt) but if βt <<1, then exp(−βt)=1−βt. Thus,the amount of energy absorbed in the silicon when the light pulsetravels through the depletion region of the drain junction is equal to:

β*t=200 cm⁻¹*2×10⁻⁴ cm=0.04=4%

In the next step 408, the processor 314 will compute a first pulse widthfor the light pulse 316 to generate the same number in electron-holepairs for the same predetermined distance of travel in the depletionregion of the drain junction (i.e., 2 μm) as the alpha-particle. It isknown that a near infrared 1 milliwatt (mW) laser emits 5×10¹⁵ photonsper second. Therefore the number of photons absorbed per second in 2 μmof silicon device (the drain depletion region) is equal to:

β*t*5×10¹⁵=0.04*5×10¹⁵=2×10¹⁴ per second.

Therefore, a 10 nanosecond pulse of a 1 mW laser will generate:

1×10⁻⁹ sec.*2×10¹⁴/sec.=2×10⁶ electron-hole pairs.

Accordingly, a 2 nanosecond pulse of a 1 mW laser will generate 4×10⁵electron-whole pairs which is equivalent to the number of electron-holepairs generated by a 5 MeV alpha-particle as previously discussed.Therefore, a red or near-infra red light pulse will be able to producethe same number of electron-hole pairs as those generated by a 5 MeValpha-particle.

In the next step 410, laser source 302 produces the light pulse 316. Thelight pulse 316 has a pulse width less than the first pulse width asdetermined in step 408 to avoid generating soft errors.

Next, in step 412, the light pulse 316 is applied to the memory deviceon the integrated circuit 318 at a predetermined location, such as thedrain junction of one of the transistor in the memory device.

In the next step 414, the processor 314 controls the light pulse energyvarying circuit 312 (as shown in FIG. 3) to increase the light pulseenergy of the light pulse 306 slowly by adjusting the intensity and/orthe pulse width of the light pulse 316 until a soft error is generated.

In step 416, the detecting circuit 310 detects the presence of softerrors by monitoring the change in logic state of the transistor inwhich the light pulse 316 is directed. When a change in logic state isdetected, a soft error would have occurred.

In the final step 418, the processor 314 recorded the light intensity,the pulse width of the light pulse 316 that generated the soft error,and the site of the soft error.

Referring now to FIG. 6, therein is shown the use of light pulse 306 tostrike a transistor 600, such as one of the transistors used in a memorycell. In this embodiment, the light pulse 306 strikes the surface oftransistor 600 with a 90° incident angle. The transistor 600 includes asilicon substrate 602. A drain junction 604, a source junction 606, anda thin layer of gate oxide 608 are shown disposed on the siliconsubstrate 602. A polysilicon gate 610 is disposed on the gate oxide 608.A metal mask 612 with an opening 614 is used to focus light pulse 316 sothat it will strike at a predetermined location on the transistor 600.In FIG. 6, light pulse 316 will only strike the drain junction 604 ofthe transistor 600, whereas the polysilicon gate 610 and the sourcejunction 606 are shielded from the light pulse 316 by the metal mask612. Using the metal mask 612, the light pulse 316 can be preciselyfocussed onto a very small, predetermined areas on an integratedcircuit, such as the drain junction of a transistor in a memory cell.Therefore, in accordance with the present invention, alpha-particlestrike can be accurately simulated by using a light pulse in conjunctionwith a metal mask which has openings that would expose predeterminedlocation on a semiconductor device and allow the light pulse to befocused on such specific location.

Referring now to FIG. 7, therein is shown the application of the lightpulse 316 to strike a semiconductor diode 700. In this embodiment, thelight pulse 316 strikes the surface of the diode 700 with a 90° incidentangle. The diode 700 includes a silicon substrate 702. A drain junction704, a source junction 706, and a thin layer of gate oxide 708 are showndisposed on the silicon substrate 702. A polysilicon gate 710 isdisposed on the gate oxide 708. A metal mask 712 with an opening 714 isused to focus light pulse 316 so that it will strike at a predeterminedlocation on the diode 700. In FIG. 7, light pulse 316 will only strikethe drain junction 704 of the diode 700, whereas the polysilicon gate710 and the source junction 606 are shielded from the light pulse 316 bythe metal mask 712.

The arrangement in FIG. 7, in combination with the apparatus 300 asillustrated in FIG. 3, is used to compute Q_(c), which is the amount ofcharge that will cause logic state reversal by causing a sufficientlylarge voltage disturbance in either DRAM or SRAM cells. The diode 700 isdesigned to have the same area and geometry as the drain junction 606 ofthe transistor 600. After the processor 314 has recorded the intensityand pulse width of the light pulse that would create a soft error intransistor 600 as illustrated in step 418 of FIG. 4 and in FIG. 6, alight pulse of the same energy (intensity and pulse width) is used tostrike the drain junction of the diode 700. A measuring/integratingcircuit 710 is coupled to process 314 and is used to measure the amountof current that flows through the drain junction 704 in response to thelight pulse 316. The measuring/integrating circuit 710 then integratesthe current and determines the amount of charge, (i.e., Q_(c)) thatflows through the drain junction 706. Subsequently, themeasuring/integrating circuit 710 outputs the value of Q_(c), to theprocessor 314. Accordingly, Q_(c) can be determined using the presentinvention. The critical charge Q_(c), can be used as a quantitativemeasure to compare the robustness to alpha-particle and/or cosmic rayinduced soft errors in different semiconductor devices and/orsemiconductor devices with different structures or fabricated usingdifferent technologies.

Referring now to FIG. 8, therein is shown the application of the lightpulse 316 at different incidence angles to a semiconductor transistor800. The transistor 800 includes a silicon substrate 802. A drainjunction 804, a source junction 806, and a thin layer of gate oxide 808are shown disposed on the silicon substrate 802. A polysilicon gate 810is disposed on the gate oxide 808. The apparatus 300 as depicted in FIG.3 can be used to provide a light pulse with a different incident angleto the transistor 800. The angle of incidence can be adjusted byproviding a relative rotational (θ) adjustment between the first fixture304 and the second fixture 306. The light pulse energies (intensity andpulse width of the light pulse 316) needed to cause a soft error atdifferent angle of incidence are recorded. The angle sensitivity of adevice to the strike by light pulse 316 (or alpha-particles ofequivalent energies) can be ascertained. The intensity and pulse widthnecessary to cause a soft error can be plotted as a function of theincidence angle in a three-dimensional graph. This information ishelpful to integrated circuit and/or packaging engineers in designingintegrated circuit that are less vulnerable to alpha-particle inducedsoft errors. For example, once the angle sensitivity of a device isknown, the engineers can make an informed decision in the relativelocations between the device in an integrated circuit and the alphasources (such as lead bumps) in a package that house the integratedcircuit.

In operation, to simulate and determine the robustness of memory cellssuch as SRAM 100 or DRAM 200 to alpha-particle induced soft errors, theapparatus 300 (as shown in FIG. 3) will be used.

The semiconductor integrated circuit 318 under test is mounted on thesecond fixture 306 as shown in FIG. 3. The power supply 308 is coupledto the integrated circuit 318 to provide power to the integrated circuit318. The detecting circuit 310 is coupled to the integrated circuit 318to detect the logic state of a memory device (not shown) within theintegrated circuit 318.

The first step 402 of the present process entails estimating energies ofan alpha-particle that is expected to strike the integrated circuit 318.

In a second step 404, the processor 314 in FIG. 3 compares a number ofelectron-hole pairs generated for a predetermined distance of travel inthe memory device by the alpha-particle.

In the next step 406, the processor 314 will compute the absorptioncoefficient (β) for the light pulse 316 (as shown in FIG. 3) with apredetermined wavelength.

In the next step 408, the processor 314 will compute a first pulse widthfor the light pulse 316 to generate the same number in electron-holepairs for the same predetermined distance of travel in the siliconjunction (the depletion region in the drain junction) as thealpha-particle.

In the next step 410, laser source 302 produces the light pulse 316. Thelight pulse 316 has a pulse width less than the first pulse width asdetermined in step 408 and with a light pulse energy that is low enoughto avoid generating soft errors.

Next, in step 412 the light pulse 316 is applied to the memory device onthe integrated circuit 318 at a predetermined location, such as thedrain region of one of the transistors in the memory device. At thisstage, the first fixture 304 and the second fixture 306 are movedrelative to each other in the X-Y-Z-θ direction so that the light pulseis focussed at the predetermined location. In one embodiment as shown inFIG. 3, the angle of incidence of the light pulse is 90°. A microscopemay be used to aid the 10 focusing of the light pulse 316 on to thepredetermined location on the integrated circuit 318. In addition, ametal mask 612 with an opening 614 which exposes the predeterminedlocation on the integrated circuit 318 (as shown in FIG. 6) can be usedto direct the light pulse so that the light pulse 316 only strikes thepredetermined location. The metal mask 612 may be built and alignedduring the fabrication of the integrated circuit 318. Therefore, inaccordance with the present invention, the metal mask 612 allows the useof a conventional laser source to generate a light pulse with a lightspot that is bigger than the areas of the predetermined location on theintegrated circuit 318.

In the next step 414, the processor 314 controls the light pulse energyvarying circuit 312 (as shown in FIG. 3) to increase the light pulseenergy of the light pulse 316 slowly by adjusting the intensity and/orthe pulse width of the light pulse 316 until a soft error is generated.

In step 416, detecting circuit 314 detects the presence of soft errorsby monitoring the change in logic state of the transistor at which thelight pulse 316 is directed. When a change in logic state is detected, asoft error would have occurred.

In the final step 418, the processor 314 recorded and/or displayed theintensity and the pulse width of the light pulse 316 that generated thesoft error. The intensity and the pulse width of the light pulse 316that generated the soft error is a qualitative indication of therobustness of the memory cell to alpha-particle and/or cosmic rayinduced soft error. This qualitative indication can be used as a toolfor comparing the robustness to alpha-particle and/or cosmic ray inducedsoft error of different devices and/or devices that have differentdesigns and/or are fabricated using different technologies.

To assist in making the comparisons, or just generally understanding thequalitative indications, the information could be displayed in a numberof different formats. For example, contour maps could be used. Fordesign, the contour maps could be superimposed on future circuitlayouts.

In another embodiment of the present invention, the light pulse 316strikes the surface of diode 700 at a 90° incident angle as shown inFIG. 7. A metal mask 712 with an opening 714 is used to focus lightpulse 316 so that it will strike a predetermined location on the diode700, i.e., the drain junction 704 of the diode 700. As explainedpreviously, diode 700 is designed to have the same area and geometry asthe drain junction 606 of the transistor 600. After the processor 314has recorded the intensity and pulse width of the light pulse thatcreated a soft error in transistor 600 as illustrated in step 418 ofFIG. 4 and in FIG. 6, a light pulse of the same energy (intensity andpulse width) is used to strike the drain junction of the diode 700. Themeasuring/integrating circuit 710 is used to measure the amount ofcurrent that flows through the drain junction 704 in response to thelight pulse 316. The measuring/integrating circuit 710 then integratesthe current and determines the amount of charge, (i.e., Q_(c)) thatflows through the drain side 706. Accordingly, Q_(c) can be determinedusing the present invention. The critical charge Q_(c) can be used as aquantitative indication of robustness of a device to alpha-particleand/or cosmic ray strikes. This qualitative indication can be used as atool for comparing the robustness to alpha-particle and/or cosmic rayinduced soft error of different devices and/or devices that havedifferent designs and/or are fabricated using different technologies.

In yet another embodiment, as shown in FIG. 8, the angle of incidence ofthe light pulse 316 is adjusted to any angle between about 0° to about180°. The angle of incidence can be adjusted by providing a relativerotational (θ) adjustment between the first fixture 304 and the secondfixture 306. The light pulse energies (intensity and pulse width of thelight pulse 316) needed to cause a soft error at different angle ofincidence are recorded. As explained previously, the information aboutangle sensitivity of a device to the strike by light pulse 316 (oralpha-particles of equivalent energies) is helpful to integrated circuitand/or packaging engineers in designing integrated circuits that areless vulnerable to alpha-particle induced soft errors.

Accordingly, the present invention describes various embodiments whichprovide inexpensive methods and apparatus that would accurately simulatean alpha-particle and/or cosmic ray strike in predetermined areas of amemory cell, with repeatable results. The present invention usesconventional light sources with sizes that can be easily accommodated ina semiconductor manufacturing facility or laboratory. Furthermore, thepresent invention provides a method that can be used to focus the lightpulse at a predetermined location on a memory cell.

While the best mode uses a laser source as the light source, other lightsources which provide light pulses, such as collimated light pulses,with light pulse energies sufficient to induce soft errors in a deviceare applicable to determine the robustness of the device toalpha-particle and/or cosmic ray induced soft errors.

While the invention has been described in conjunction with a specificbest mode, it is to be understood that many alternatives, modifications,and variations will be apparent to those skilled in the art in light ofthe aforegoing description. Accordingly, it is intended to embrace allsuch alternatives, modifications, and variations which fall within thespirit and scope of the included claims. All matters set forth herein orshown in the accompanying drawings are to be interpreted in anillustrative and non-limiting sense.

The invention claimed is:
 1. An apparatus for determining the robustnessof a device to soft errors generated by alpha-particle and/or cosmic raystrikes, comprising: a light source for producing a light pulse which isapplied to the device at a predetermined location, said light pulsehaving a light pulse energy; a light pulse energy varying circuitcoupled to said light source and configured to vary said light pulseenergy; a processor coupled to said light source and said light pulseenergy varying circuit for controlling said light source and said lightpulse energy varying circuit and configured to determine: a number ofelectron-hole pairs generated for a predetermined distance of travel bythe alpha-particle and/or cosmic ray into the device based on anestimated energy of the alpha-particle and/or cosmic ray strikes, anabsorption coefficient in the device for a light pulse with apredetermined wavelength, and a first pulse width for said light pulseto generate said number of electron-hole pairs for said predetermineddistance of travel by said light pulse into the semiconductor device;and a detecting circuit coupled to the device and configured to detectthe soft errors in the device.
 2. The apparatus as claimed in claim 1wherein said light source producing said light pulse produces acollimated light pulse.
 3. The apparatus as claimed in claim 1 whereinsaid light source producing said light pulse produces a laser pulse. 4.The apparatus as claimed in claim 1 wherein said light source producingsaid light pulse produces said light pulse having a pulse width and anintensity; and said light pulse energy varying circuit is adapted tovary said intensity, said pulse width, or a combination thereof of saidlight pulse.
 5. The apparatus as claimed in claim 1 wherein the deviceincludes a plurality of transistors with each of the plurality oftransistors at a predetermined logic state and wherein: said detectingcircuit determines changes in said predetermined logic states of theplurality of transistors.
 6. An apparatus for determining the robustnessof a semiconductor device to soft errors generated by alpha-particle andor cosmic ray strikes, the device includes a plurality of transistorswith each of the plurality of transistors at a predetermined logicstate, comprising: a laser source for producing a light pulse which isapplied to the device at a predetermined location, said light pulsehaving a light pulse energy; a light pulse energy varying circuitcoupled to said laser source and configured to vary said light pulseenergy; a processor coupled to said laser source and said light pulseenergy varying circuit for controlling said laser source and said lightpulse energy varying circuit and configured to determine: a number ofelectron-hole pairs generated for a predetermined distance of travel bythe alpha-particle and/or cosmic ray into the device based on anestimated energy of the alpha-particle and/or cosmic ray strikes, anabsorption coefficient in silicon for a light pulse with a predeterminedwavelength, and a first pulse width for said light pulse to generatesaid number of electron-hole pairs for said predetermined distance oftravel by said light pulse into the semiconductor device; and adetecting circuit coupled to the device and configured to detecting softerrors in the device, wherein the detecting circuit determines changesin the predetermined logic states of each of the plurality oftransistors.
 7. The apparatus as claimed in claim 1 wherein: said lasersource produces said light pulse having a pulse width and an intensity;and said light pulse energy varying circuit is adapted to vary saidintensity, said pulse width, or a combination thereof of said lightpulse.